PRODUCTS

Semiconductor devices

Since the CMP process was first applied to semiconductor device production in 1980, we have accumulated many achievements and a great deal of knowledge as a leading company in polishing pads. At present, our product lineup includes slurries and conditioners as well as a wide variety of pads. We are positioned for speedy handling of wide variety of customer requests.

CMP pad

Introducing pads optimized to customer requests, with the de facto standard IC1000™, the VISIONPAD™ series which performs excellent defect performance, and the IKONIC™ series which is targeting advanced processes below 28nm node.

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Semiconductor devices

CMP slurry

We offer slurries suited to all needs, including the ILD™3000/ ILD™4000 series (fumed silica) for oxide, the Wolflat™ series (high selectivity, non selectivity) for tungsten, and the ACUPLANE™ series for Cu barriers.

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Semiconductor devices

Diamond conditioner (KINIK Inc.)

We offer diamond conditioner from KINIK Company in Taiwan. It delivers high performance through KINIK's advanced bonding technologies and diamond arrangement technologies.

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Semiconductor devices