Products

(03) Conditioner / Fixturing

Pads, slurries, and comprehensive polishing solutions

NITTA DuPont provides comprehensive polishing solutions for ultra-precision surface polishing through our lineup of polishing consumables such as polishing pads, polishing slurries, fixturing products, and conditioners.
Our Template Assembly fixturing products affix silicon and other wafers to polishing heads without the use of wax. Our DiaGrid® Series of conditioners produces exceptional conditioning performance, especially for hard foamed polyurethane pads.

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Function (issue)

Fixturing (backing material)

Our fixturing (backing material) products are used to affix wafers to polishing machine carrier plates without the use of wax. They aid in producing flatter wafers and substrates as well as improving productivity through automation. They are available in a wide range of sizes and materials, so we can provide fixturing that is matched to customer needs.

Application
Semiconductor/Silicon wafer/other
Matching products
R303 ・ R305 ・ R601 ・ R703

Debug

  • 工程

    研磨装置へのウェーハ固定

  • 機能

    高平坦性 ・ 高吸着性 ・ 耐薬品性 ・ ウェーハ保持性

Pad conditioner for CMP (KINIK COMPANY)

We have a general sales agreement with Taiwan’s KINIK COMPANY, serving as the Japanese sales contact point for KINIK’s CMP Pad Diamond Conditioner (Diamond Disk). KINIK’s superb brazing technologies and diamond arrangement technologies produce a high level of conditioning performance.

Application
Semiconductor/Silicon wafer
Matching products
DiaGrid ® ・ Pyradia ®

Debug

  • 工程

    研磨パッドコンディショナー(ダイヤモンド)

  • 機能

    研磨パッド立ち上げ ・ 研磨パッド表面特性の維持

Supreme™, MH™, EXTERION™, ILD™, Nanopure™ and Machplaner™ are trademarks of NITTA DuPont Incorporated.

IC1000™ is a trademark or service mark of NITTA DuPont Incorporated or affiliates of DuPont de Nemours, Inc.

Suba™, VisionPad™, Ikonic™, Optivision™, Acuplane™, Optiplane™ and Novaplane™ are trademarks, service marks or registered trademarks of affiliates of DuPont de Nemours, Inc.

DiaGrid ® and Pyradia ® are registered trademarks of KINIK Company.