MH™系列

“MH™系列”是基于卓越的发泡控制技术诞生的聚氨酯抛光垫,主要适用于硅晶片的初抛与半精抛工序。该产品可满足200mm及300mm晶片的高平坦化抛光需求。

用途
硅晶片/其他

MH™ S15S

用途
硅晶片/其他
工艺
一次抛光
功能
降低成本

(01) Polishing Pad 抛光垫

Supreme™, MH™, EXTERION™, ILD™, Nanopure™ and Machplaner™ are trademarks of NITTA DuPont Incorporated.

IC1000™ is a trademark or service mark of NITTA DuPont Incorporated or affiliates of DuPont de Nemours, Inc.

Suba™, VisionPad™, Ikonic™, Optivision™, Acuplane™, Optiplane™ and Novaplane™ are trademarks, service marks or registered trademarks of affiliates of DuPont de Nemours, Inc.

DiaGrid ® and Pyradia ® are registered trademarks of KINIK Company.