Suba™产品系列
“Suba™产品系列”是以无纺布为基础的抛光垫，主要适用于硅晶片的初抛、半精抛及终抛工序。该产品具有高去除速率、高平坦度与低缺陷特性，可广泛应用于GaAs、InP、LiTaO₃、LiNbO₃等多种晶片材料。
Suba™400H
Suba™600
Suba™800
(01) Polishing Pad 抛光垫
Supreme™, MH™, EXTERION™, ILD™, Nanopure™ and Machplaner™ are trademarks of NITTA DuPont Incorporated.
IC1000™ is a trademark or service mark of NITTA DuPont Incorporated or affiliates of DuPont de Nemours, Inc.
Suba™, VisionPad™, Ikonic™, Optivision™, Acuplane™, Optiplane™ and Novaplane™ are trademarks, service marks or registered trademarks of affiliates of DuPont de Nemours, Inc.
DiaGrid ® and Pyradia ® are registered trademarks of KINIK Company.
