EXTERION™ Series

The EXTERION™ Series is the next-generation successor to the MH™ Series. It contributes to improved quality for a wide range of applications, including the latest wafer manufacturing processes.

Application
Silicon wafer

EXTERION™ SL-42

Application
Silicon wafer
Process
Stock polishing
Function
Wafer defect reduction

EXTERION™ SM-11

Application
Silicon wafer
Process
Stock polishing
Function
wafer edge flatness

EXTERION™ SL-11

Application
Silicon wafer
Process
Stock polishing
Function
wafer edge flatness ・ High removal rate

EXTERION™ N1251M

Application
Silicon wafer
Process
Stock polishing
Function
wafer edge flatness ・ High removal rate

(01) Polishing Pad

Supreme™, MH™, EXTERION™, ILD™, Nanopure™ and Machplaner™ are trademarks of NITTA DuPont Incorporated.

IC1000™ is a trademark or service mark of NITTA DuPont Incorporated or affiliates of DuPont de Nemours, Inc.

Suba™, VisionPad™, Ikonic™, Optivision™, Acuplane™, Optiplane™ and Novaplane™ are trademarks, service marks or registered trademarks of affiliates of DuPont de Nemours, Inc.

DiaGrid ® and Pyradia ® are registered trademarks of KINIK Company.

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