ILD™ Series

In the high quality ILD™ Series, exceptional dispersion technologies are used to stabilize the performance of fumed silica abrasive. This series improves customer processes thanks to its high quality, low defect performance and its high polishing efficiency.

Application
Semiconductor

ILD™3225

Application
Semiconductor
Process
Oxidization layer
Function
High removal rate ・ Wafer defect reduction

ILD™4221

Application
Semiconductor
Process
Oxidization layer
Function
High removal rate ・ Wafer defect reduction

(02) Polishing Slurry

Supreme™, MH™, EXTERION™, ILD™, Nanopure™ and Machplaner™ are trademarks of NITTA DuPont Incorporated.

IC1000™ is a trademark or service mark of NITTA DuPont Incorporated or affiliates of DuPont de Nemours, Inc.

Suba™, VisionPad™, Ikonic™, Optivision™, Acuplane™, Optiplane™ and Novaplane™ are trademarks, service marks or registered trademarks of affiliates of DuPont de Nemours, Inc.

DiaGrid ® and Pyradia ® are registered trademarks of KINIK Company.

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