Nanopure™ Series

The Nanopure™ Series of polishing slurry is used for silicon wafer stock polishing, semi-final polishing, final polishing, and edge polishing. These slurries offer stable, exceptional polishing performance, including a high level of flatness, low defectivity, and high productivity.

Application
Silicon wafer

Nanopure™NP6220

Application
Silicon wafer
Process
Stock polishing
Function
Metal impurity reduction

Nanopure™NP6501

Application
Silicon wafer
Process
Stock polishing
Function
High removal rate

Nanopure™NP6504

Application
Silicon wafer
Process
Stock polishing
Function
High removal rate

Nanopure™NP6610

Application
Silicon wafer
Process
Stock polishing
Function
High removal rate ・ Wafer surface roughness reduction

Nanopure™NP6700

Application
Silicon wafer
Process
Stock polishing
Function
Edge shape optimization ・ Wafer surface roughness reduction

Nanopure™EG1103

Application
Silicon wafer
Process
Edge polishing
Function
High removal rate ・ Cost reduction

Nanopure™NP7310

Application
Silicon wafer
Process
Semi-final polishing
Function
High removal rate ・ Cost reduction

Nanopure™NP7050S

Application
Silicon wafer
Process
Semi-final polishing
Function
Excellent wafer edge flatness ・ Natural oxidation layer removal efficiency

Nanopure™NP8020H

Application
Silicon wafer
Process
DSP rinsing ・ Semi-final polishing
Function
High removal rate

Nanopure™NP8065

Application
Silicon wafer
Process
Final polishing
Function
Wafer defect reduction ・ Cost reduction

Nanopure™NP8100

Application
Silicon wafer
Process
Final polishing
Function
Wafer defect reduction

Nanopure™NP8205

Application
Silicon wafer
Process
Final polishing
Function
Wafer defect reduction

(02) Polishing Slurry

Supreme™, MH™, EXTERION™, ILD™, Nanopure™ and Machplaner™ are trademarks of NITTA DuPont Incorporated.

IC1000™ is a trademark or service mark of NITTA DuPont Incorporated or affiliates of DuPont de Nemours, Inc.

Suba™, VisionPad™, Ikonic™, Optivision™, Acuplane™, Optiplane™ and Novaplane™ are trademarks, service marks or registered trademarks of affiliates of DuPont de Nemours, Inc.

DiaGrid ® and Pyradia ® are registered trademarks of KINIK Company.

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