Novaplane™NVP1001
- Application
- Semiconductor
- Process
- Tungsten
- Function
- High removal rate ・ Step height reduction ・ Cost reduction
- TOP
- Products
- PolishingSlurry
- Novaplane ™ Series
Novaplane ™ Series
The Novaplane™ Series lineup consists of tungsten (W) slurries with high polishing efficiency and adjustable selectivity. They meet customer needs for tungsten CMP thanks to their exceptional flatness and low defectivity properties and the cost reductions they offer customers.
Novaplane™NVP1001
(02) Polishing Slurry
Supreme™, MH™, EXTERION™, ILD™, Nanopure™ and Machplaner™ are trademarks of NITTA DuPont Incorporated.
IC1000™ is a trademark or service mark of NITTA DuPont Incorporated or affiliates of DuPont de Nemours, Inc.
Suba™, VisionPad™, Ikonic™, Optivision™, Acuplane™, Optiplane™ and Novaplane™ are trademarks, service marks or registered trademarks of affiliates of DuPont de Nemours, Inc.
DiaGrid ® and Pyradia ® are registered trademarks of KINIK Company.
