Nanopure™ Series

The Nanopure™ Series of polishing slurry is used for silicon wafer stock polishing, semi-final polishing, final polishing, and edge polishing. These slurries offer stable, exceptional polishing performance, including a high level of flatness, low defectivity, and high productivity.

Application
Semiconductor/Silicon wafer

Nanopure™NP3660

Application
Semiconductor/Silicon wafer
Process
Polysilicon ・ Stock polishing
Function
Ultra-high removal rate

(02) Polishing Slurry

Supreme™, MH™, EXTERION™, ILD™, Nanopure™ and Machplaner™ are trademarks of NITTA DuPont Incorporated.

IC1000™ is a trademark or service mark of NITTA DuPont Incorporated or affiliates of DuPont de Nemours, Inc.

Suba™, VisionPad™, Ikonic™, Optivision™, Acuplane™, Optiplane™ and Novaplane™ are trademarks, service marks or registered trademarks of affiliates of DuPont de Nemours, Inc.

DiaGrid ® and Pyradia ® are registered trademarks of KINIK Company.

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