Machplaner™ Series

The Machplaner™ Series is used for the polishing of compounds such as sapphire compounds and for polishing oxidized substrates such as LiTaO3 substrates or LiNbO3 substrates. Thanks to their optimal grain composition, they produce high removal rates and high surface quality.

Application
Resin/Ceramic ・ Sapphire substrate/Other ・ Glass substrate/Quartz substrate ・ LiTaO3 substrate/LiNbO3 substrate

Machplaner™MS2030

Application
Sapphire substrate/Other
Process
Stock polishing ・ Final polishing
Function
High removal rate ・ Low friction resistance

Machplaner™MS2105

Application
Sapphire substrate/Other
Process
Stock polishing ・ Final polishing
Function
High removal rate

Machplaner™ST2010

Application
Glass substrate/Quartz substrate
Process
Stock polishing ・ Final polishing
Function
High removal rate

Machplaner™MS3005

Application
LiTaO3 substrate/LiNbO3 substrate
Process
Stock polishing ・ Final polishing
Function
High removal rate ・ Wafer surface roughness reduction

Machplaner™MS4300

Application
Resin/Ceramic
Process
Stock polishing ・ Final polishing
Function
High removal rate ・ High selectivity

(02) Polishing Slurry

Supreme™, MH™, EXTERION™, ILD™, Nanopure™ and Machplaner™ are trademarks of NITTA DuPont Incorporated.

IC1000™ is a trademark or service mark of NITTA DuPont Incorporated or affiliates of DuPont de Nemours, Inc.

Suba™, VisionPad™, Ikonic™, Optivision™, Acuplane™, Optiplane™ and Novaplane™ are trademarks, service marks or registered trademarks of affiliates of DuPont de Nemours, Inc.

DiaGrid ® and Pyradia ® are registered trademarks of KINIK Company.